<図書>

Dry etching for VLSI / A.J. van Roosmalen, J.A.G. Baggerman, and S.J.H. Brader

(Updates in applied physics and electrical technology)

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出版者 New York : Plenum Press
出版年 c1991
大きさ xvii, 237p. ; 26 cm
一般注記 Includes bibliographical references and index
著者標目 *Roosmalen, A. J. van
Baggerman, J. A. G.
Brader, S. J. H.
件 名 LCSH:Semiconductors -- Etching
LCSH:Integrated circuits -- Very large scale integration -- Design and construction
LCSH:Plasma etching
分 類 LCC:TK7871.85
DC20:621.381/52
本文言語 英語
書誌ID 2000206972
ISBN 0306438356
NCID BA12663213 WCLINK

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